Vertical AlGaN Deep Ultraviolet Light Emitting Diodes with Polarization Enhanced p-AlGaN Epilayer on Si Substrate
نویسندگان
چکیده
Despite of the technological importance developing AlGaN deep UV LEDs on Si, there are only a few reports about Si based epilayers. Herein, we show vertical with polarization enhanced p-AlGaN epilayer. The devices emit at 278 nm, uniform current injection. Compared to using standard epilayer, series resistance epilayer is reduced by factor 5. This work represents first report
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ژورنال
عنوان ژورنال: ECS Journal of Solid State Science and Technology
سال: 2022
ISSN: ['2162-8769', '2162-8777']
DOI: https://doi.org/10.1149/2162-8777/ac7663